Eng Phys 4Z03/6Z03

Semiconductor Manufacturing Technology

Term II – 2015/2016

Instructor: Dr. L. Soleymani

Prerequisite: ENG PHYS 3F03 or 3F04


Course Objectives:
A successful student is expected to be able to do the following by the end of the course:

  • Demonstrate knowledge of the processes used to fabricate integrated semiconductor components in a modern cleanroom facility; specifically: photolithography, wet and dry etching, dielectric and metal deposition, thermal annealing, ion implantation and some element of device packaging.
  • Design and simulate the entire fabrication flow, and the operation, of an integrated semiconductor device.
  • Review and offer criticism of examples of publish reports which discuss new approaches to semiconductor processing, specifically those that wish to maintain the trajectory of Moore’s law.
  • Make a detailed written and oral presentation on their work, specifically that pertaining to the design and simulation of the process flow and operation of an integrated semiconductor device

Please find the full syllabus for ENG PHYS 4Z03/6Z03 here.